2015年11月20日 星期五

Three Si photonics platforms delivered by EU R&D project

Three Si photonics platforms delivered by EU R&D project

CEA-Leti,and it partners have developed three silicon photonics platforms under the four year €10.2 million EU PLAT4M project. Leti’s platform delivers multilevel silicon patterning on 200mm SOI wafers allowing the design of various passive and active devices (such as modulator and photodiode) with thermal tuning capability. Two AlCu levels are available for routing. A PDK ...

David Manners



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