TSMC will run at 100% fab utilisation throughout the second half of the year, reports Digitimes.
Digitimes is quoting Morris Chang who also said that 20nm would account for 10% of total revenues in Q3 and 20% in Q4.
45nm and better processes account for half total revenues.
TSMC says it has 20 customers for its 16nm finfet process.
The company says it will set up a 300-400 person R&D lab to develop a 10nm process scheduled for trial production in 2015 and mass production in 2016.
Total capacity in 2013 was 15.67 million eight inch wafer equivalents. In 2012, it was 14.04 million.
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