2021年2月15日 星期一

Infinitesima ships Rapid Probe Microscope for 3D characterisation of semiconductors

Infinitesima of Abingdon has shipped its first Rapid Probe Microscope system – RPM 3D – claimed to be the first RPM 3D system for delivering 3D metrology applications for characterisation of state-of-the-art semiconductor devices. The system was co-developed with Imec. The microscope is an enhanced version of the RPM already applied in Mask repair applications. ...

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