2021年12月23日 星期四

Hitachi launches e-beam inspection system for EUV 3nm and 5nm processes

Hitachi High-Tech Corporation today announced the Development of its Electron Beam Area Inspection System. The device manufacturers are beginning to utilise EUV  in the mass production of 5nm node devices and the development of 3nm node devices. As circuit pattern dimensions manufactured using EUV lithography are approximately half of the size of those produced by ...

This story continues at Hitachi launches e-beam inspection system for EUV 3nm and 5nm processes

Or just read more coverage at Electronics Weekly



from News – Electronics Weekly https://ift.tt/3H44sH1
via Yuichun

沒有留言:

張貼留言