2021年11月22日 星期一

CEA-Leti claims smallest MEMS gyroscope

CEA-Leti scientists, in collaboration with researchers at Politecnico di Milano have developed the world’s smallest-footprint MEMS gyroscope that is capable of providing navigation-grade performance. The researchers were able to meet these specifications with a sensor footprint of only 1.3 mm by leveraging nano-resistive sensing. Combining CEA-Leti’s expertise in highly sensitive sensors based on silicon nano-gauges ...

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