2015年2月6日 星期五

1.5 nm Metrology Extends Moore's Law

Even a ruler can nix Moore's Law. Rulers need to be as much as 10 times finer than the semiconductors they are measure. Thanks to researchers at some US national labs collaborating with industry, the finest metrology tool is now at 1.5 nanometers.



from EETimes: http://ift.tt/1ELN07a

via Yuichun

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