ASML, TSMC reach milestone in EUV productivity

ASML has confirmed that Taiwan Semiconductor Manufacturing Company (TSMC) has successfully exposed more than 1000 wafers on an NXE:3300B EUV system in a single day, an important step towards insertion of EUV lithography in volume production of semiconductors.



from DIGITIMES: IT news from Asia http://ift.tt/1AMYK5v

via Yuichun