2022年2月28日 星期一

ISSCC 2022: MEMS senses zeptograms

‘Zeptogram’ caught the eye at ISSCC 2022 conference last week, as researchers from French lab CEA-Leti produced a mass sensor with 170zg resolution for weighing molecules. Not only did they make one such sensitive weighing scale, but 1,024 of them in an array which can be scanned at high speed. The weighing part had been ...

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