Naura Technology (formerly Beijing Sevenstar Electronics) has started shipping ion etch equipment for the manufacture of 14nm chips to chipmakers, while Advanced Micro-Fabrication Equipment (AMEC) is being engaged in the development of etch tools for the production of 5nm chips, according to industry sources.
from DIGITIMES: IT news from Asia http://ift.tt/2oo13M5
via Yuichun
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